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FUJITSU QUALITY LABORATORY

Japan

Emission microscope

Detect weak light emitted by abnormal phenomenon occurring inside IC.
Defective spot can be located by detecting light emitted by abnormal phenomenon such as hot electron, leak, or latch up.

Test Equipment

Emission microscope

Emission microscope
Manufacturer: Hamamatsu Photonics K.K.
Model: PHEMOS-200

Example

Analyze abnormal characteristic in terminal

Detect abnormal light emitted near terminal.

Photo image by Emission microscope