Emission microscope
Detect weak light emitted by abnormal phenomenon occurring inside IC.
Defective spot can be located by detecting light emitted by abnormal phenomenon such as hot electron, leak, or latch up.
Test Equipment
Emission microscope
Manufacturer: Hamamatsu Photonics K.K.
Model: PHEMOS-200
Example
Analyze abnormal characteristic in terminal
Detect abnormal light emitted near terminal.
