SEM
Field Emission-Scanning Electron Microscope
Scanning Electron Microscope (SEM) is a system that provides the image of secondary electron intensity etc, which is emitted
from surface of the specimen, through two-dimensionally scanning finely integrated electron beam on the specimen in vacuo.
The system allows us to observe the asperity or difference in constitution on the surface under magnification from several
hundreds to several ten-thousands.
Especially, FE-SEM employs elctron source of Cold field Emission type, realizing observation with less accelerating voltage,
higher resolution and at higher magnification compared to conventional thermal electro emission type.
Microscopic analysis is also available by applying X-ray spectrometer to SEM.
Our semi-in-lens design FE-SEM features;
- Dimensional size of specimen: Large size up to 26mm diameter
- Resolution capability: 1.2nm(15kV), 2.5nm(1kV)
- Maximum magnification: x 650,000
Example
High resolution configuration observation
Diamond growth
Surface of ITO spattered film
Microscopic pattern
Even view from oblique direction, system captures entire focus area clearly without decreasing resolution.
(Left) Image captured by Semi-in-lens type
(Right) Image captured by Semi-in-lens type with Fujitsu Quality Laboratory Ltd original technology applied