FUJITSU QUALITY LABORATORY

LSM

Laser Scanning Microscope

LSM gives the clear image of surface profile of the specimen even the surface is not smooth. The focal depth that LSM provides is clearer than the optical microscope does, so it is worth getting LSM image if you need clearer image of the surface profile.
LSM also present the profile of the specific location / direction, or.3D image. This feature helps us to measure the distance between the certain points, the height of the point, or the surface roughness.

Technology: The system scans the surface of the specimen by laser beam, then detects the reflected light that comes into the focus.

Equipment

LSM system

VK-8500 (keyence)

Example

Surface profile of the PWB pad

基板電極のプロファイル表示

Profile

Give the chart and table that show the distance (horizontal direction), height, and the angle.

Measurements



Dent in the plating layer

めっき膜に生じたくぼみのプロファイル表示

Profile

おもて面の三次元画像

3D (from the surface)

うら面の三次元画像

3D (From the back side)



Recycle paper

optical microscope image

Optical microscope

LSM image

LSM


LSM, 3D image

LSM, 3D image