Method Course
The table lists each analysis method, its details, and equipment used for the analysis.
| Analysis | Detail | Equipment |
|---|---|---|
| Morphology observation |
Specimen preparation (Cutting, Grinding, Polishing, FIB processing, Etching on Metal structure, etc) Photo, cut-surface analysis, surface roughness, etc |
Micro watcher, Metallographic microscope (OM), Laser Microscope, SEM, FE-SEM, Transmission Electron Microscope（TEM）, Atomic force microscope（AFM/SPM） |
| FIB processing |
Cross section processing, Trace processing, Taking SIM image |
Field Emission-Scanning Electron Microscope（FIB-SIM） |
| Structure | Structure analysis | X-ray analysis (XRD) |
| Micro Analysis |
Photographing analysis target, Qualitative analysis, Quantitative / Semi-quantitative analysis, Linear analysis, Surface analysis (monochrome mapping) Color mapping, etc | Electron Probe X-ray Micro Analyzer（EPMA）, SEM-electron beam micro analysis（SEM-WDX/EDX） |
| Surface Analysis |
Photographing analysis target, State analysis, Qualitative analysis, Semi-quantitative analysis, Linear analysis, Color mapping, Depth profile, etc |
Auger Electron Spectroscopy（AES,SAM）, X-ray Photoelectron Spectroscopy(XPS), Micro XPS |
| Element Analysis |
Specimen preparation (Machine processing, Acid dissolution, Alkali dissolution, Hydrogen fluoride acid resolution, Neutralization) Semi-quantitative/Quantitative analysis, Qualitative analysis |
Inductively Coupled Plasma Atomic Emission Spectroscopy（ICP-AES）, Fluorescent X-ray spectroscopy（XRF） |
| Chemical Analysis |
Specimen preparation (Filtration, cleaning, fluid element processing, extraction, etc) Qualitative / Quantitative analysis, Semi-quantitative analysis |
Ion Chromatography（IC）, Capillary electrophoresis system |
| Organic Analysis |
Specimen preparation (Heating, Extraction, etc), IR spectrum measurement (Transmission method, Total reflection method, High sensitivity reflection method, Microscopic IR method, etc) MS spectrum measurement (EI/ Heat dissolution EI / TCT method), Quantitative analysis, Analysis of Heat induced gas from wafer, Analysis of Clean room organic Gas, etc |
Fourier Transform Infrared Spectrophotometer（FT-IR）, Gas Chromatography – Mass Spectrometer（GC-MS）, Wafer heat-induced gas analyzer, Gas chromatography analysis (GC) |
| Material Test |
Thermogravimetric analysis, Differential thermal analysis, Differential scanning calorie analysis, Vickers hardness measurement, Tensile measurement, Deflecting strength measurement, Paper characteristic evaluation, etc |
Thermogravimetric analysis system EXSTAR6000, Digital Dust meter, Hydrogen-ion concentration meter, Vickers hardness meter, Tensile tester, Conductivity meter, etc |
| Environment Investigation | Calculation of estimated density through fluorescent X-ray analysis, Environment investigation, Dust density measurement, Gas density measurement, etc |
Eco checker |